Divide in time to conquer the surface - ALD studies to understand surface chemistry of AlₓTi₁₋ₓN CVD
- Författare
- Linköpings universitet Pamburayi Mpofu
- (Pamburayi Mpofu., Funding agencies: Seco Tools AB, the Swedish Foundation for Strategic Research through the project "Time-resolved low temperature CVD for III-nitrides" (SSF RMA 150018), and Vinnova through the project "Surface chemical mechanisms in atomic layer deposition of hard nitrides" (2023-02815), Härtill 6 uppsatser, Diss. (sammanfattning) Linköping : Linköpings universitet, 2025)
- Genre
- Avhandlingar, theses
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Department of Physics, Chemistry and Biology (IFM). Linköping University | 2025 | Sverige, Linköping | xxii, 67 sidor illustrationer | 978-91-8118-223-1 |